About: http://webisa.webdatacommons.org/73079861

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present invention is a method and system for the drilling of holes in a workpiece within a diameter range of 20 ??m to 500 ??m by means of laser radiation.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com