About: http://webisa.webdatacommons.org/73080656

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This type of damage is caused both when the ferroelectric material itself is etched, and when an underlying layer such as the bottom electrode layer is etched.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es