About: http://webisa.webdatacommons.org/73158828

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A barrier layer 50 is formed over the surface of the substrate 20, thereby preventing impurities such as alkali metal contained in the substrate 20 from seeping.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com