About: http://webisa.webdatacommons.org/7334531

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	MEMS is a technology used to create tiny devices which can be less than a millimeter in size.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com