About: http://webisa.webdatacommons.org/7335178

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Microelctromechanical systems (MEMS) such as sensor, robots and other devices that can detect
http://www.w3.org/ns/prov#wasQuotedFrom	slideshare.net