About: http://webisa.webdatacommons.org/73365031

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Preferably, disposable spacer 22 is composed of SiN or SiO2, with SiO2 spacers being especially preferred in the present invention.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es