About: http://webisa.webdatacommons.org/73403634

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Preferably, metal layer 14 is formed of a refractory metal, a refractory metal alloy, or other electrically conductive material such as a metal nitride such as TiN or the like or silicides such as TiSi or the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com