About: http://webisa.webdatacommons.org/73540559

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A substrate can be any material and, in some embodiments, is a silicon wafer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es