About: http://webisa.webdatacommons.org/7396987

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	20100188658HIGH RESOLUTION WAFER INSPECTION SYSTEM - A method for inspecting a region, including irradiating the region via an optical system with a pump beam at a pump wavelength.
http://www.w3.org/ns/prov#wasQuotedFrom	faqs.org