About: http://webisa.webdatacommons.org/74014321

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 7 is a flow chart illustrating one embodiment of a process utilizing pulses of a purge gas to deposit a ternary material layer with a tuned composition.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es