About: http://webisa.webdatacommons.org/74238684

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 5 is a plan view showing the location of a region where a trench interconnect is formed and its periphery just after completing the step in FIG. 3F, and
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr