| http://www.w3.org/ns/prov#value | - The film thickness is adjusted so as to become a thickness, for example around 50 nm, that functions as a protective film to prevent diffusion of H2O. Next, annealing to evaporate the organic solvent containing the protective material is carried out in an oxygen atmosphere at about 400??? C. In this way, the protective film 260 is formed.
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