About: http://webisa.webdatacommons.org/75162988

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The next step is to deposit a material preferably with a coefficient of thermal expansion similar to that of the substrate, for example using chemical vapor deposition (CVD).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com