About: http://webisa.webdatacommons.org/75207442

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The underlying gallium nitride layer preferably is formed on a substrate, which itself includes a buffer layer such as aluminum nitride, on a substrate such as 6H--SiC(0001).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com