About: http://webisa.webdatacommons.org/75257698

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method of claim 15 in which the dielectric material is a graded dielectric material selected from the group consisting of graded silicon oxide and graded silicon nitride.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com