About: http://webisa.webdatacommons.org/7530776

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	This invention pertains generally to precursors and deposition methods for thin films aerogels on semiconductor substrates, including deposition methods suited to aerogel thin film fabrication of nanoporous dielectrics.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com