About: http://webisa.webdatacommons.org/75356577

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present invention is a capacitive pickoff accelerometer which uses doped (conductive) silicon for the mechanical parts such as the diaphragm or pendulum, and other parts.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca