About: http://webisa.webdatacommons.org/75464989

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The interlayer dielectric 34 may be made of insulator including at least one silicon oxide.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com