About: http://webisa.webdatacommons.org/75534759

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Therefore, Si precipitation is a problem because it degrades the lithography process via surface roughness and it reduces interconnect reliability via stress-induced voiding.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com