| http://www.w3.org/ns/prov#value | - Thus when the layer thickness of the conductive layer 11 is, for example, 500 nm and the layer thickness of the support 19 is 185 ??m, it is most preferred that the depth of the groove be in the range of about 5 to about 120 ??m, particularly 10 to 100 ??m.
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