About: http://webisa.webdatacommons.org/75596021

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The substrate may be, for example, a semiconductor substrate, such as a silicon wafer or other substrate on which integrated circuits and other electronic devices are formed.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com