About: http://webisa.webdatacommons.org/75604155

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The photolithographic process can be conducted in three ways including the use of a gray-level mask, performing a multi-step exposure process, or the use of a half-tone mask.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com