About: http://webisa.webdatacommons.org/75606022

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The resulting structure with the trapped charge at an interface is particular useful for MEMS enabling technology, but can be used to inject charge in other types of devices.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es