About: http://webisa.webdatacommons.org/75610283

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The methods and apparatuses described herein can be used with any workpiece, such as a semiconductor wafer, flat panel, magnetic film head, packaging substrate, and the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com