About: http://webisa.webdatacommons.org/75672512

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Photolithography is a well known process that comes in a variety of types and capabilities.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com