About: http://webisa.webdatacommons.org/75813003

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Therefore, the size and/or load of the driving system including actuators, etc., for adjusting the relative position of the mask and photosensitive substrate, can be reduced.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com