| http://www.w3.org/ns/prov#value | - The basin 204 is generally fabricated from a plastic such as fluoropolymers, TEFLON??? polymers, perfluoroalkoxy resin (PFA), polyethylene-based plastics (PE), sulfonated polyphenylether sulfones (PES), or other materials that are compatible or non-reactive with the polishing composition or other chemicals used in the processing cell 200.
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