About: http://webisa.webdatacommons.org/75844455

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The dielectric film is typically made from a material having a low dielectric constant such as silicon oxide (SiO2), silicon oxide/silicon nitride (SiO2/Si3N4), and the like.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com