About: http://webisa.webdatacommons.org/75919089

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	have been deposited on surfaces at small feature size using a variety of techniques including laser ablation, photolithography, the use of shadow masks, and other techniques.
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com