About: http://webisa.webdatacommons.org/75992163

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The grooves or slits are filled with a dielectric material or isolating material such as silicon dioxide or the like to isolate active regions in the semiconductor substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com