About: http://webisa.webdatacommons.org/76014481

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The CMP tool of claim 18 wherein said layer being polished is a metal or metal alloy layer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es