About: http://webisa.webdatacommons.org/76314129

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Another exemplary embodiment of the present invention is a method of forming a fluid channel in a semiconductor substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au