About: http://webisa.webdatacommons.org/76390602

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In this case, it is important to select not only the acceleration energy, but also dose and ion species, such as Ge or As.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com