About: http://webisa.webdatacommons.org/76424126

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In accordance with still another aspect of the present invention, there is provided a semiconductor device including an SOI substrate, a gate structure, a silicidation prevention pattern and a gate spacer.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com