About: http://webisa.webdatacommons.org/76475144

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In particular it relates to the production of a thin film made of a semi-conducting material, for example such as silicon.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com