About: http://webisa.webdatacommons.org/76526495

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In addition, in this example, as the layer for the structure, silicon dioxide was used, but other insulating material, which can be processed as film, such as silicon nitride, Al2 O3, APN etc. can be used.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com