About: http://webisa.webdatacommons.org/77430644

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIGS. 5(a) to 5(b) are cross sectional views of a semiconductor device using an SOI substrate in the prior art, for explaining the problems such as the charging up phenomenon.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com