About: http://webisa.webdatacommons.org/77520592

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	are formed on a substrate such as a Si wafer or a glass slab for providing interconnection.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com