About: http://webisa.webdatacommons.org/77697122

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	However, there is a limit in reducing the size of the pattern by the photolithography technique, and a pattern having a size of approximately 0.4 ??m is the smallest pattern that can be formed by the photolithography technique.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com