About: http://webisa.webdatacommons.org/77886843

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Note that the fifth embodiment of the present invention is a method for manufacturing a semiconductor device utilizing the thermal CVD reaction.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com