About: http://webisa.webdatacommons.org/77974379

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Copper is a relatively soft, malleable metal and a CMP process presses the slurry onto the wafer with substantial pressure and mechanical force.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com