About: http://webisa.webdatacommons.org/78023957

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For instance, higher heating at the edges of the wafer is desirable for oxidation or nitridation or other high temperature, long-time processes.
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com