| http://www.w3.org/ns/prov#value | - For example, a tungsten layer may be sputtered onto the passivation/insulation layer 24 using a tungsten target and an argon source, and having a substrate temperature of about 250??? C., an ambient temperature of about 200??? C., and a low pressure, such as one ranging from 0.01 millitorr to 1???10???6 torr.
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