About: http://webisa.webdatacommons.org/78163137

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Moreover, as illustrated for example in FIG. 8, where the lead finger is sufficiently thin in the z direction, parts of the support pedestal 82 may touch the surface of the substrate 12 alongside the base of the lead finger 62.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au