About: http://webisa.webdatacommons.org/78348347

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	CMOS, micromachining, bonding, deposition, masking, etching or other processes are used to form the chemical sensor 16 on the same substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com