About: http://webisa.webdatacommons.org/78569577

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Aside from ruthenium, materials such as Ir and Pt may also be used to form the first upper metal layer 608.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es