| http://www.w3.org/ns/prov#value | - As used herein, a "sample generically describes a substrate, such as a glass panel or a silicon wafer, which is suitable for deposition techniques, for example PECVD. The sample has a front side, which is treated to receive one or more coating depositions onto the surface, and has a back side, which is generally used to support and manipulate the sample.
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