About: http://webisa.webdatacommons.org/78634631

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 3K shows the partially completed semiconductor device 300 shown in FIG. 3J with the trench 224 filled with a conductive material such as aluminum, tungsten, copper or doped polysilicon.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com