About: http://webisa.webdatacommons.org/78770208

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Field of the Invention [0004] This invention relates to methods for depositing silicon (Si) and germanium (Ge) in various manufacturing process, such as in semiconductor manufacturing.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com