About: http://webisa.webdatacommons.org/7881525

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Chambers 804, 805, 806, 807, and 808 are processing chambers for depositions of materials, heat treatments, etching, or other processes.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca